MicroWriter ML3
Preparation and fabrication
MicroWriter ML3
Features:
- 385nm long-life semiconductor light source
- Extremely fast writing speed
- 195 mm x 195 mm maximum writing area
- XY interferometer with 1nm resolution for precise motion control
- Autofocus system
- High quality infinite conjugate optical microscope
- Automatic changing between microscope magnifications via software
- Acceptable file formats: CIF, GDS2, BMP, TIFF, JPEG, PNG, GIF; Oasis, DXF, Gerber RS-274X acceptable via Clewin 6 conversion.
- Virtual mask aligner mode
Contact Person
Martin Kalbáč
Location
Cleanroom
