UHV exfoliation system
UHV
Custom-made UHV exfoliation system composed of:
- a 4-axis multicentered micromanipulator as crystal-holding stamp
- a 2-axis multicentered micromanipulator as substrate-holding stage, heating stage and goniometer
- an optical/Raman microscope for in-situ characterization of the samples
- an e-beam evaporator + quartz balance for metal deposition
- plasma chamber
- loadlock chamber
- a UHV suitcase for transfer of the samples
Contact Person
Martin Kalbáč
Location
313