UHV exfoliation system

UHV

Custom-made UHV exfoliation system composed of:

  • a 4-axis multicentered micromanipulator as crystal-holding stamp
  • a 2-axis multicentered micromanipulator as substrate-holding stage, heating stage and goniometer
  • an optical/Raman microscope for in-situ characterization of the samples
  • an e-beam evaporator + quartz balance for metal deposition
  • plasma chamber
  • loadlock chamber
  • a UHV suitcase for transfer of the samples
Contact Person
Martin Kalbáč
Location
313