Dual magnetron sputterer - Quorum Q300T

Preparation and fabrication

Quorum Q300T D dual magnetron sputterer

Features:

  • Vacuum pressure of up to 5x10⁻⁵ mbar
  • Dual sputter head for in-situ sequential coating of samples (Ø up to 150 mm) with different metals
  • Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
Contact Person
Martin Kalbáč
Location
Cleanroom