Schottky Field Emission Scanning Electron Microscope - Jeol JSM-IT800
Microscale characterization
Jeol JSM-IT800SHL Schottky Field Emission Scanning Electron Microscope (SEM) with Raman spectroscopy capabilities
Features:
- Schottky Field-Emission SEM
- Energy Dispersive X-ray Spectrometer (EDS)
- Secondary (SE) and back-scattered (BS) electrons detection
- Raman-SEM capabilities
Specs:
- Resolution: 0.5 nm (15 kV)
- Photo magnification: ×10 to ×2,000,000 (128 × 96 mm)
- Landing voltage: 0.01 to 30 kV
- Detector: Secondary electron detector (SED); Upper hybrid detector (UHD); Panchormatic PMT detector
- Electron gun: In-lens Schottky Plus field emission electron gun
- Objective lens: Super hybrid lens - an electromagnetic/electrostatic field superposed objective lens
- Specimen stage: Full eucentric goniometer stage, tilt: -5 to 70°
- Stage control: 5-axis motor drive
- Low vacuum mode available.
- Analysis function:
- Energy Dispersive Spectroscopy (EDS)
- Cathodoluminescence (CL)
- Raman spectroscopy using Horiba iHR550, equipped with three gratings: 150 gr/mm (500 nm blaze), 600 gr/mm (500 nm blaze), 1800 gr/mm (450-850 nm blaze). 532 nm excitation is provided by the Oxxius L1C-532S laser. Peltier-cooled Syncerity CCD detector (E2V)
Contact Person
Martin Kalbáč
Location
Basement