UHV system for surface analysis of thin films, interfaces and nanostructures
- Ultra-high vacuum apparatus for characterization of samples by methods of
- X-ray photoelectron spectroscopy (XPS)
- angle resolved photoelectron spectroscopy (ARPES) with 3D spin detector
- ultraviolet photoelectron spectroscopy (UPS)
- low energy electron diffraction (LEED)
- scanning probe microscopy (SPM)
- low energy ion scattering spectroscopy (LEIS)
System of four interconnected vacuum chambers (SPECS) pumped by turbomolecular and ion pumps, pressure of residual gases 10-10 mbar. Motorized 5-axes sample manipulator, sample holder cooling by liquid He down to 20 K. X-ray source with micro-focus (200 um) and UV source based on duoplasmatron. Monochromators for X-ray and UV radiation, hemispherical 180° electron energy analyzer PHOIBOS 150 (SPECS) with scanning angle lens, angular resolution better than 0.1°, energy resolution better than 2 meV. Two-dimensional CCD detector , deflector 90° , spin rotator and FERRUM spin detector of VLEED type (FOCUS). Low energy (10-200 keV) and high energy (0.2-5 keV) ion source with differential pumping. Reverse view LEED optics, Aarhus STM, electron beam evaporator and microwave plasma source.